In processes where a lot of powder occurs, such as ALD and MOCVD, the powder is exhausted toward the pump and solidifies on the flapper, which is relatively lower than the ambient temperature, causing many problems during valve operation.

Other companies cover heating jackets, but heat conduction is not smooth on the flapper.

In order to solve this problem, heater was built into the flapper as well as the valve body to solve the phenomenon of powder accumulation in the flapper.